| Angle Tolerance | Δθ≤±0.5∘, Δϕ≤±0.5∘ |
| Dimensional Tolerance | (W±0.01mm)×(H±0.01mm)×(L±0.02mm/−0.01mm) |
| Flatness | λ/8 @ 632.8nm |
| Surface Quality (S/D) | 10/5 (Before coating), 20/10 (After coated) |
| Parallelism | ≤20 arc seconds |
| Perpendicularity | ≤5 arc minutes |
| Wavefront Distortion | λ/8 @ 632.8nm |
| Clear Aperture | Central 95% |
| Chamfer | 0.15×45∘ |
| Coating | Protective coating is required to prevent polished surface from being fogged. Anti-reflective coating should be considered if low reflectivity is required. |
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